36" ID Sputter Coating Chamber High Vacuum Thin Film Deposition 700 Liter Volume
Used see photos. We tested pumping down to 1.6 mTorr, the limit of our roughing pump (not included, but we used an undersized Edwards E2M30 to pump it down overnight). This purchase includes the entire chamber and all viewports, blank flanges, motors, tubing, and the internal drum, EXCEPT for the Micro-Ion gauge and roughing pump which was visible in the last photo. Those were used solely for testing and are NOT included with this purchase. Highly modular system with lots of ports.
The chamber body has the following ports. Please refer to photos for all flange sizes and locations:
-7x DN150CF
-1x ASA7.5
-7x DN35CF
-2x ISO-200K
-1x ASA 16.0 / ANSI 10
-Passthroughs for coolant lines
-1/4" NPT port for vacuum gauge
The internal measurements of this chamber are approximately 36" diameter by 40" edge to edge depth. The chamber doors have a 6" outward curve and the inner rack rotates via a motor that passes through the front door. The opposite door is fixed and meant for a cryogenic pump to mount onto the ASA7.5 port. The base frame measures approximately 42"W x 42"L x 40"H. The overall dimensions of this chamber from its extremities is 45"W x 68"L x 85"H.
Due to the size and weight of this chamber, it will need to be shipped via freight. Buyer is responsible for the costs of freight shipping to their facility. We can palletize or crate it for a fee.
