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40" 1000L High Vacuum PVD Sputter Chamber Rotating Substrate Stages Thin Film

40" 1000L High Vacuum PVD Sputter Chamber Rotating Substrate Stages Thin Film

Regular price $14,950.00 USD
Regular price Sale price $14,950.00 USD
Sale Sold out
Shipping calculated at checkout.
40" Sputter Coating Chamber Thin Film Deposition Rotating Platters 1000L Volume

Used, see photos. We tested the chamber by pumping it down to the limit of our roughing pump. The chamber was able to rough down to 1.6 mTorr and hold well. We are including all blanks, the ASA16.0 pneumatic gate valve and throttle, manual side vent angle valve, both stage rotation flanges, and the 3x DN35CF flange on top EXCEPT for the Convectron and Micro-Ion gauges shown in some of the final photos. These were used for testing and are NOT included with this purchase. 

The chamber dimensions are 40" ID by 48" L. The chamber doors curve outwards by 8". The base frame dimensions 46"W x 71"L x 38"H. The full dimensions of the chamber with all ports is 70"W x 94"L x 96"H.

A list of ports is as follows. Please refer to photos for the location and sizes of ports:
-10x DN63CF
-3x DN35CF
-4x DN100CF
-1x ISO-100K
-5x ASA7.5 viewports
-2x ASA 16.0 / ANSI 10


Due to the size and weight of this chamber, it will need to be shipped via freight. Buyer is responsible for the costs of freight shipping to their facility. We can palletize or crate it for a fee.


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