Conflat DN100CF 6" CF CF100 Flange Swagelok Gas Water Cooled Imaging Stage Thin Film UHV Ultra High Vacuum
Used see photos. Knife edge in good condition.
Custom water-cooled copper wafer chuck / substrate holder assembly mounted on a 6" CF / DN100CF ConFlat UHV flange for semiconductor, thin-film deposition, sputtering, evaporation, etching, or surface-science vacuum systems. The vacuum-side assembly features a large copper chuck/disc with integrated water-cooling plumbing and external Swagelok-style tube fittings, designed to thermally stabilize wafers or substrates during vacuum processing. When removed, the copper disc still had semiconductor wafers/substrate material present, suggesting prior use in a semiconductor or thin-film process chamber. Useful as a replacement cooled wafer stage, substrate holder, cold plate, or custom UHV process fixture. Includes only what is shown; no chamber, controller, heater, thermocouple readout, water chiller, copper gasket, mounting hardware, or external plumbing is included unless pictured.
