MKS 390710-2-YG Micro-Ion ATM EtherCAT UHV HV High Vacuum Gauge 2.75" CF DN35CF 20011655-001
For sale is an MKS Granville-Phillips Series 390 “Micro-Ion ATM” modular vacuum gauge module with EtherCAT compatibility and a 2.75" CF vacuum connection. Installed tube/gauge assembly is 390100-YG (yttria-coated filament build). Wide-range, four-sensor combo design (Micro-Ion + Conductron + piezo sensors) for continuous pressure coverage from high vacuum up through atmosphere.
Condition: Used; fully functional. Pulled from service; cleaned and bench-checked.
Included: Gauge/module only; no cables, no controller, no power supply.
See photos for exact configuration and connectors.
Fully tested (analog output verification)
We verified the analog output at multiple points using our turbo test station. Using the Series 390 manual conversion for vacuum pressure output:
P (Torr) 10^(2·Vout − 11)
Measured Vout → equivalent pressure:
6.93 V → 7.24E+2 Torr (≈ 9.66E+2 mbar)
5.26 V → 3.31E-1 Torr (≈ 4.41E-1 mbar)
3.94 V → 7.59E-4 Torr (≈ 1.01E-3 mbar)
3.57 V → 1.38E-4 Torr (≈ 1.84E-4 mbar)
2.938 V → 7.52E-6 Torr (≈ 1.00E-5 mbar)
2.164 V → 2.13E-7 Torr (≈ 2.84E-7 mbar)
If you’re doing vacuum process work and you’re fighting trying to juggle multiple gauges/controllers, this unit is a beast: one compact transducer that’s happy from roughing to UHV, plus EtherCAT for tidy integration. It’s the “set it and forget it” pressure transducer.
Keywords: MKS, Granville Phillips, GP 390, Micro-Ion ATM, 390A, 390100-YG, EtherCAT, wide range vacuum gauge, ion gauge, conductron, piezo, 2.75 CF, NW35CF, DN35CF, CF35, vacuum transducer, turbo pump, UHV
