Used MKS Instruments / Granville-Phillips 390710-2-YG-T Micro-Ion ATM vacuum gauge module. EtherCAT comms, 2 setpoint relays, YG hot-cathode Micro-Ion tube, 2.75" CF (NW35CF / DN35CF) conflat flange.
Date of manufacture: March 2020. Excellent cosmetic and functional shape. See photos.
Tested: real analog output points captured across a wide range (Torr):
7.00 V ≈ 1.00e3 Torr
5.93 V ≈ 7.24 Torr
5.07 V ≈ 1.38e-1 Torr
3.776 V ≈ 3.56e-4 Torr
3.14 V ≈ 1.91e-5 Torr
2.346 V ≈ 4.92e-7 Torr
Could use a calibration once it is installed in-place.
Great fit for: turbo pump systems, load locks, sputter / evap, gloveboxes, vacuum furnaces, SEM prep, thin film tools, PLC/DAQ integration, interlocks via setpoints, and EtherCAT-based automation racks.
Included:
1x MKS/GP 390710-2-YG-T gauge module (as pictured)
Does not includes voltmeter readout, cables, or our turbo pumping station. If you need other vacuum components, please reach out to us. We sell verified turbo pumps, gauges, fittings, and more.
Keywords:
MKS 390710; 390710-2-YG-T; Granville Phillips; GP 390; Micro-Ion ATM; hot cathode ion gauge; conductron; piezo; combination gauge; atmosphere to UHV; 2.75 CF; NW35CF; DN35CF; ConFlat; EtherCAT vacuum gauge; analog output vacuum transducer; setpoint relay vacuum; interlock gauge; semiconductor vacuum; thin film deposition; sputter coater gauge; vacuum furnace gauge; turbo pump control gauge.
