Tested working MKS Granville-Phillips Series 385 Convectron ATM vacuum gauge module, part number 385011-GD-T, with DeviceNet interface, local digital display, and KF/NW16 vacuum connection. This compact rough-vacuum / atmosphere-transfer gauge combines Convectron heat-loss pressure sensing with a piezo-resistive diaphragm sensor for continuous measurement from atmosphere down to 1 x 10⁻⁴ Torr, plus differential pressure indication around atmosphere for load lock and chamber transfer applications. MKS describes the Series 385 Convectron ATM module as useful where both low-pressure measurement and accurate atmospheric differential pressure indication are needed, especially vacuum system loadlocks; DeviceNet versions include a local 3-digit LED display and setpoint relay functionality. Good fit for semiconductor tools, thin-film deposition systems, sputtering, evaporation, vacuum chambers, glovebox/load-lock interfaces, process tools, foreline monitoring, roughing lines, automation systems, R&D vacuum benches, and OEM vacuum equipment repair. Unit only; cables, controller, power supply, fittings, and calibration certificate not included unless shown. Tested for basic operation; sold as used lab/process equipment, not freshly calibrated.
